Development of an Optimization Procedure for Magnetron-Sputtered Thin Films to Facilitate Combinatorial Materials Research

Bunn, Jonathan K., Richard Z. Voepel, Zhiyong Wang, Edward P. Gatzke, Jochen A. Lauterbach, and Jason R. Hattrick-Simpers. 2016. “Development of an Optimization Procedure for Magnetron-Sputtered Thin Films to Facilitate Combinatorial Materials Research”. Industrial & Engineering Chemistry Research 55 (5): 1236-42.