Gate Oxide Reliability Studies of Commercial 1.2 kV 4H-SiC Power MOSFETs

Liu, Tianshi, Shengnan Zhu, Susanna Yu, Diang Xing, Arash Salemi, Minseok Kang, Kristen Booth, Marvin H. White, and Anant K. Agarwal. 2020. “Gate Oxide Reliability Studies of Commercial 1.2 kV 4H-SiC Power MOSFETs”. 2020 IEEE International Reliability Physics Symposium (IRPS).

Abstract

This work examines the gate oxide ruggedness and underlying failure mechanisms of commercially available large-area 1.2 kV 4H-SiC power MOSFETs from multiple vendors. Both gate leakage current and time-dependent dielectric breakdown (TDDB) measurements are performed at various voltage stresses with temperatures between 28°C and 175°C. While some vendors show promising gate oxide reliability results such as low gate leakage current ( 100pA) and >106 hours lifetime at 175°C with VG=20 V, anomalous gate leakage current behaviors and TDDB characteristics are observed for other vendors. The anomalous gate oxide reliability measurement results are related to the pre-existing gate oxide defects and interface traps. Gate leakage current measurements at different temperatures reveal insights into the oxide quality. The authors also observe that constant-voltage TDDB measurement can greatly overestimate the oxide lifetime when a significant amount of extrinsic oxide defects exist before the measurements.
Last updated on 04/02/2024